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光ヘテロダイン光熱変位測定による半導体の熱物性評価 (2) Si-NP/SiGe複合膜の測定
http://hdl.handle.net/10458/00010455
http://hdl.handle.net/10458/000104555806e7f3-6046-404f-b940-40799cf42105
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
本文 (1.3 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2022-12-06 | |||||
| タイトル | ||||||
| タイトル | 光ヘテロダイン光熱変位測定による半導体の熱物性評価 (2) Si-NP/SiGe複合膜の測定 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Evaluation of thermal properties of semiconductors by using a laser heterodyne photothermal displacement measurement (2) Measurement and calculation of Si-NP/SiGe composite film | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Nanostructure | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Thermal conductivity | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Non-contact and non-destructive method | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
森田, 浩右
× 森田, 浩右× 原田, 尚吾× 大山, 博暉× 原田, 知季× 大堀, 大介× 寒川, 誠二× 碇, 哲雄× 福山, 敦彦× Morita, Kosuke× Harada, Shogo× Ohyama, Hiroki× 原田, 知季× 大堀, 大介× Samukawa, Seiji |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Laser heterodyne photothermal displacement measurements were carried out to clarify the thermal conductivity (????) of Si-nanopillars/SiGe composite films. To investigate how the nanopillar spacing reduces ????, three samples with different nanopillar spacing were prepared. Comparing the theoretical calculations based on the single-layer thermal diffusion equation with the experimental results, surface displacement and its time variation could not be explained by change in value of ????????. It was found that differences in the Si-NP spacing may have caused a change in optical properties such as the optical absorption coefficient. Furthermore, theoretical calculations based on the thermal diffusion equation of the three-layer model were used to reproduce the experimental results. The ???????? of the Si-NP/SiGe composite film was estimated by fitting the time variation of displacement. Obtained best-fitted value of ???????? were too small and were the order of 0.1 W/mK. Although quantitative analysis for ???????? needs improvement, the present LH-PD measurement and three-layer model analysis are useful to investigate the thermal properties of semiconductors. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 51, p. 51-55, 発行日 2022-11-30 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.miyazaki-u.ac.jp/tech/research/memoirs/ | |||||
| 関連名称 | 宮崎大学工学部 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
