{"created":"2023-05-15T10:01:55.119449+00:00","id":6603,"links":{},"metadata":{"_buckets":{"deposit":"77ee2558-6c61-4330-83e7-65dd6f89501d"},"_deposit":{"created_by":5,"id":"6603","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"6603"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00006603","sets":["73","73:36","73:36:330","73:36:330:496"]},"author_link":["15200","33677","33679","34036","7289","33682","33678","7290","33683","34037","34035","34038"],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2022-11-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"55","bibliographicPageStart":"51","bibliographicVolumeNumber":"51","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Laser heterodyne photothermal displacement measurements were carried out to clarify the thermal conductivity (????) of Si-nanopillars/SiGe composite films. To investigate how the nanopillar spacing reduces ????, three samples with different nanopillar spacing were prepared. Comparing the theoretical calculations based on the single-layer thermal diffusion equation with the experimental results, surface displacement and its time variation could not be explained by change in value of ????????. It was found that differences in the Si-NP spacing may have caused a change in optical properties such as the optical absorption coefficient. Furthermore, theoretical calculations based on the thermal diffusion equation of the three-layer model were used to reproduce the experimental results. The ???????? of the Si-NP/SiGe composite film was estimated by fitting the time variation of displacement. Obtained best-fitted value of ???????? were too small and were the order of 0.1 W/mK. Although quantitative analysis for ???????? needs improvement, the present LH-PD measurement and three-layer model analysis are useful to investigate the thermal properties of semiconductors.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of 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