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  1. 教育学部・大学院教育学研究科
  2. その他 (教育学部)

The Effect of Thickness Layer on ITO Nanostructure Prepared by Oblique Angle Deposition

http://hdl.handle.net/10458/6862
http://hdl.handle.net/10458/6862
271978ba-6465-4f48-9a9a-d09cfac30cca
名前 / ファイル ライセンス アクション
icste2016_p281.pdf 本文 (2.3 MB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2020-06-22
タイトル
タイトル The Effect of Thickness Layer on ITO Nanostructure Prepared by Oblique Angle Deposition
言語 en
言語
言語 eng
キーワード
言語 en
主題Scheme Other
主題 ITO nanostructure, Evaporation, Oblique angle deposition
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_5794
資源タイプ conference paper
著者 P, Nuchuay

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T, Chaikeeree

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N, Kasayapanand

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N, Mungkung

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S, Arunrungrusmi

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M, Horprathum

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P, Eiamchai

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S, Limwichean

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V, Patthanasettakul

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N, Nuntawong

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C, Oros

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S, Denchitcharoen

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B, Samransuksamer

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内容記述タイプ Abstract
内容記述 The oblique-angle deposition (OAD) technique was studied in this work. The thin films solar cell Indium doped tin oxide (ITO) were synthesized by the electron-beam evaporation with oblique angle deposition technique .The physical properties of crystalline nanostructured thin films can be analyzed by the grazing-incident X-rad diffraction(GIXRD), field-emission scanning electron microscopy(FE-SEM),UV-Vis spectrophotometer and four-point probe measurements, respectively. The FE-SEM results showed that the increased thickness layer greatly affected the morphologies and the GIXRD method was considered mostly polycrystalline with the cubic bixbite structure of the ITO nanostructures. Finally, the optical transmission of the ITO nanostructure films exhibited higher than 85% in the visible range.
言語 en
書誌情報 en : International Conference on Science, Technology & Education (ICSTE 2016)

p. 281-284, 発行日 2016-09
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出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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