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超音波気化支援装置を用いた真空紫外光 CVD による石英様薄膜の常圧形成に関する研究
http://hdl.handle.net/10458/5879
http://hdl.handle.net/10458/587915bcbda0-305d-47e3-9a9f-cfa1fda85544
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
本文 (1.1 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-06-21 | |||||
| タイトル | ||||||
| タイトル | 超音波気化支援装置を用いた真空紫外光 CVD による石英様薄膜の常圧形成に関する研究 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Formation of SiO2-like Thin Films under Atomospheric Pressure by Vacuum Ulraviolet CVD using Ultrasonic Assisted Vaporizer | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Mist, Ultrasonicwave, Vacuum ultraviolet-CVD, TEOS, Atomospheric pressure | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
桑水流, 康記
× 桑水流, 康記× 井上, 祐貴× 亀山, 晃弘× 横谷, 篤至× KUWAZURU, Yasunori× INOUE, Yuuki |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Using ultrasonicwave, we have developed a technique to support the vaporization of TEOS which is hardly vaporized by only decompression in Vacuum ultraviolet chemical vapor deposition (VUV-CVD). Mist of TEOS with the averaged particle size of 4 μm was generated by an equipment combinating a double vessel system and an ultrasonic device of which freguency is 1.7 MHz. TEOS was successfully vaporized under the room temperature and atmospheric pressure by using this equipment, and flat SiO2-like films were deposited with the VUV-CVD method, using a Xe excimer lamp(λ=172 nm). Besides, by the observation with the scanning electron microscope it was found that a number of spherical particles of around 0.6 ~ 0.8 μm in diameter were observed on the film. We have also demonstrated that the spherical particles on the film surface can be reduced by reducing the mist particles from the introducing gas material. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 45, p. 95-99, 発行日 2016-07-31 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
