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Adsorption and Self-limiting Mechanisms of Trimethylaluminum and Water on Aluminum Oxide Surface
http://hdl.handle.net/10458/3202
http://hdl.handle.net/10458/3202e75c9cf4-6105-4272-bde8-15880913940e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
engineering39-19.pdf (239.6 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2011-02-25 | |||||
| タイトル | ||||||
| タイトル | Adsorption and Self-limiting Mechanisms of Trimethylaluminum and Water on Aluminum Oxide Surface | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Atomic-layer-epitaxy, Self-limiting mechanism, γ-Al2O3, Adsorption | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
Ozeki, Masashi
× Ozeki, Masashi× Haraguchi, Tomohiro× Hirakawa, Keisuke× Uwai, Kohei |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The adsorption processes of (CH3) 3Al (TMA) and H2O on γ-Al2O3 have been studied to obtain the basic data on the self-limiting mechanism in the atomic layer epitaxy (ALE). The reactant species, TMA and H2O, were transported onto heated Al2O3 surface with the hydrogen carrier gas. The adsorption rate, as a function of the surface coverage of aluminum or oxygen, was estimated from the reactant exposure-time dependence of the deposition thickness of γ-Al2O3. The aluminum and oxygen coverage dependence of the adsorption rate suggested that the TMA and H2O were adsorbed by a precursor-mediated mechanism. The ALE of γ-Al2O3 was investigated on the basis of the adsorption data. The self-limiting mechanism, which automatically stopped the growth at just one monolayer of γ-Al2O3 (001), was observed in the TMA and H2O exposure-duration dependences. A growth model of the γ-Al2O3 ALE successfully explained the growth rate. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 39, p. 117-124, 発行日 2010-09-30 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
