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Dynamical behavior of methylchloride on GaAs(001)
http://hdl.handle.net/10458/1616
http://hdl.handle.net/10458/161677f31189-f866-4c89-91ed-77995b0d5cfd
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KJ00005015945.pdf (138.3 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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| 公開日 | 2008-11-11 | |||||
| タイトル | ||||||
| タイトル | Dynamical behavior of methylchloride on GaAs(001) | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Atom-solid interactions, scattering, Molecule-solid scattering, Gallium arsenide, Chemisorption, Physical adsorption, Methylchloride | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| その他（別言語等）のタイトル | ||||||
| その他のタイトル | Dynamical behavior of methylchloride on GaAs(001) | |||||
| 言語 | en | |||||
| 著者 |
尾関, 雅志
× 尾関, 雅志× 冨川, 満広× 鬼塚, 尚幸× Tomikawa, Mitsuhiro× Onitsuka, Naoyuki |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The dynamical behavior of methylchloride (CH3Cl), which is an important precursor in the atomic order etching of III-V compounds, was studied on a GaAs(001)-2x4 surface using a supersonic molecular beam. Direct scattering and trapping/desorption channels of incident CH3Cl were assigned based on a detailed analysis of incident energy and angle dependence of the scattered molecule. A large energy exchange from translational to rotational modes was observed for directly scattered CH3Cl. A trajectory simulation was conducted to quantitatively explain the angle dependence of scattered CH3Cl, energy exchange at collision, and the energy dependence of trapping probability on the surface. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 37, p. 135-139, 発行日 2008-08-30 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
