@article{oai:miyazaki-u.repo.nii.ac.jp:00002677,
 author = {尾関, 雅志 and Ozeki, Masashi and 冨川, 満広 and 鬼塚, 尚幸 and Tomikawa, Mitsuhiro and Onitsuka, Naoyuki},
 journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki},
 month = {Aug},
 note = {The dynamical behavior of methylchloride (CH3Cl), which is an important precursor in the atomic order etching of III-V compounds, was studied on a GaAs(001)-2x4 surface using a supersonic molecular beam. Direct scattering and trapping/desorption channels of incident CH3Cl were assigned based on a detailed analysis of incident energy and angle dependence of the scattered molecule. A large energy exchange from translational to rotational modes was observed for directly scattered CH3Cl. A trajectory simulation was conducted to quantitatively explain the angle dependence of scattered CH3Cl, energy exchange at collision, and the energy dependence of trapping probability on the surface.},
 pages = {135--139},
 title = {Dynamical behavior of methylchloride on GaAs(001)},
 volume = {37},
 year = {2008},
 yomi = {オゼキ, マサシ and トミカワ, ミツヒロ and オニツカ, ナオユキ}
}