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短パルスレーザーを用いた表面加工技術の開発
http://hdl.handle.net/10458/4111
http://hdl.handle.net/10458/41114c7cfe3c-31d6-4c9d-8b2f-18145a6938df
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
engineering41_149-154.pdf (1.0 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2012-10-31 | |||||
| タイトル | ||||||
| タイトル | 短パルスレーザーを用いた表面加工技術の開発 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Development of Surface Processing Technique using Short Pulse Laser of Fs-region | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Fs-laser, Processing, Morphological change, LIPSS, Ripple | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| その他（別言語等）のタイトル | ||||||
| その他のタイトル | タンパルス レーザー オ モチイタ ヒョウメン カコウ ギジュツ ノ カイハツ | |||||
| 言語 | ja-Kana | |||||
| 著者 |
松尾, 真一郎
× 松尾, 真一郎× 伊豆, 光平× 冨高, 譲× 甲藤, 正人× 青山, 智夫× 横谷, 篤至× Matsuo, Shin-Ichiro× Izu, Kouhei× Tomitaka, Yuzuru× Aoyama, Tomoo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In recent years, pulse lasers which have pulse widths of fs-region have become to be used for various proposes such as semiconductor fabrications, MEMS, mechanical engineering and so on. The advantage of using short pulse laser is suppressing the heat affected area around the processed part, and therefore, not only the precise processing without the partial melting but also the easy observation of small morphological changes of irradiated become portion to be achieved. The laser induced periodic surface structure(LIPSS) are the typical example of such changes. In general, these kind of advantages are often emphasized by comparing with the nanosecond lasers. However, there is the difference as much as 100,000 times between these two lasers. This fact is considered to be a reason of the luck of information about mechanism of the periodic structure formation. From this point of view, in this study, we have tried to observe the morphological changes of surface produced by the irradiation of pulse laser with different pulse widths in fs-region. As a result, we found the formation condition of a μm-order-periodic structure which was different from the LIPSS. This structure is so-called `ripple'. In the present paper, we discussed the irradiation condition (pulse width, fluence, and shot numbers) for producing the ripple with the pulse width controlled fs-laser and investigated the possibility to apply to new surface processing technique. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 41, p. 149-154, 発行日 2012-07-30 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
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松尾, 真一郎, 伊豆, 光平, 冨高, 譲, 甲藤, 正人, 青山, 智夫, 横谷, 篤至, Matsuo, Shin-Ichiro, Izu, Kouhei, Tomitaka, Yuzuru, Aoyama, Tomoo, 2012, 短パルスレーザーを用いた表面加工技術の開発: 宮崎大学工学部, 149–154 p.
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