@article{oai:miyazaki-u.repo.nii.ac.jp:00002648,
 author = {松尾, 真一郎 and 伊豆, 光平 and 冨高, 譲 and Katto, Masahito and 甲藤, 正人 and 青山, 智夫 and Yokotani, Atsushi and 横谷, 篤至 and Matsuo, Shin-Ichiro and Izu, Kouhei and Tomitaka, Yuzuru and Aoyama, Tomoo},
 journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki},
 month = {Jul},
 note = {In recent years, pulse lasers which have pulse widths of fs-region have become to be used for various proposes such as semiconductor fabrications, MEMS, mechanical engineering and so on. The advantage of using short pulse laser is suppressing the heat affected area around the processed part, and therefore, not only the precise processing without the partial melting but also the easy observation of small morphological changes of irradiated become portion to be achieved. The laser induced periodic surface structure(LIPSS) are the typical example of such changes. In general, these kind of advantages are often emphasized by comparing with the nanosecond lasers. However, there is the difference as much as 100,000 times between these two lasers. This fact is considered to be a reason of the luck of information about mechanism of the periodic structure formation. From this point of view, in this study, we have tried to observe the morphological changes of surface produced by the irradiation of pulse laser with different pulse widths in fs-region. As a result, we found the formation condition of a μm-order-periodic structure which was different from the LIPSS. This structure is so-called `ripple'. In the present paper, we discussed the irradiation condition (pulse width, fluence, and shot numbers) for producing the ripple with the pulse width controlled fs-laser and investigated the possibility to apply to new surface processing technique.},
 pages = {149--154},
 title = {短パルスレーザーを用いた表面加工技術の開発},
 volume = {41},
 year = {2012},
 yomi = {マツオ, シンイチロウ and イズ, コウヘイ and トミタカ, ユズル and カットウ, マサヒト and アオヤマ, トモオ and ヨコタニ, アツシ}
}