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PLD法を用いたSi-Mn薄膜成長の初期過程の観察
http://hdl.handle.net/10458/4708
http://hdl.handle.net/10458/4708c08a394e-9ba5-4820-90af-9b54d1a0e606
名前 / ファイル | ライセンス | アクション |
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engineering35-39.pdf (975.2 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-12-25 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | PLD法を用いたSi-Mn薄膜成長の初期過程の観察 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Observation of the Initial Stage of Si-Mn Thin Film Formation Process by PLD Method | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | STM, PLD, Diluted magnetic semiconductor, Adosorption, Mn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | PLDホウ オ モチイタ Si-Mn ハクマク セイチョウ ノ ショキ カテイ ノ カンサツ | |||||
言語 | ja-Kana | |||||
著者 |
宇野, 貴大
× 宇野, 貴大× 木原, 亮太× 横谷, 篤至× 宇野, 貴大× Kihara, Ryouta |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Recently, thin films of Si-Mn compound in atomic scale have been studied for developing the diluted magnetic semiconductors. In this study, we focused on the behavior of Mn particles on Si(111) surface by pulsed laser deposition (PLD) method. Especially, we observed the adsorption site and its dependence on temperature of the substrate. The substrate used was cleaned Si(111) plate. Mn particles were supplied by the PLD method and a scanning tunneling microscope (STM) was used for the observation. In this work, we observed a change of adsorption site with the temperature change and the surrounding adsorbed particles. We observed the change in the absorption site and the surface structure of the substrate surrounding the Mn particles with the temperature change of RT ~ 200℃. As a result, we clarified the behavior of the particles on the Si(111) clean surface of Mn. These results are expected to be useful information for understanding a mechanism for the formation of Si-Mn very thin film. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 42, p. 35-39, 発行日 2013-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |