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PLD法による薄膜形成の初期過程の観察
http://hdl.handle.net/10458/3211
http://hdl.handle.net/10458/32116712c4a8-d19c-45aa-b340-c6253b09ca75
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
engineering39-28.pdf (962.4 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2011-02-25 | |||||
| タイトル | ||||||
| タイトル | PLD法による薄膜形成の初期過程の観察 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Observation of the Initial Stage of Thin Film Formation Process by PLD Method | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | PLD, STM, Initial stage, Si(111), C60 | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| その他（別言語等）のタイトル | ||||||
| その他のタイトル | PLDホウ ニヨル ハクマク ケイセイ ノ ショキ カテイ ノ カンサツ | |||||
| 言語 | ja-Kana | |||||
| 著者 |
岡崎, 裕太郎
× 岡崎, 裕太郎× カイリル, ヌルフスナ ビンティ× 甲藤, 正人× 横谷, 篤至× 岡崎, 裕太郎× Khairir, Nurulhusna Binti× Katto, Masato |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Pulsed laser deposition (PLD) is a method using a simple device that can form film under various conditions and can be used for research of film growth. However, it is difficult to achieve forming films of good quality because of a lot of unknown points in the mechanisms. In order to clarify the mechanism of the deposition process in PLD method, we have observed the initial stage of film deposition process on the Si(111)-7×7 surface. In the present work, we have compared to the results on Si3N4 and SiC thin films. An ultra-high-vacuum scanning tunneling microscope (UHV-STM) was used for the observation of surface morphologies. Sintered Si3N4, single crystalline Si, HOPG and pressed C60 were used for the PLD targets. Our results suggest that by PLD method, particles ablated from targets adsorbed onto the substrate surface without destroying the structure of substrate surface. We also used a Time of Flight Mass Spectrometry (TOF-MS) to analyze ablated particle. Our results suggest that single atomic particles are ablated in PLD process. For the each targets, we have clarified the adsorption sites, adsorption probabilities, size and shape of adsorbed particles. These results are expected to be useful information for clarification of the mechanism of the deposition process of PLD method. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 39, p. 173-178, 発行日 2010-09-30 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
