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Optical Emission Characteristics of Atmospheric-Pressure Nonequilibrium Microwave Discharge and High-Frequency DC Pulse Discharge Plasma Jets
http://hdl.handle.net/10458/2076
http://hdl.handle.net/10458/2076c5657b2f-4fe1-403c-bbbc-176dd133a298
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2009-07-09 | |||||
タイトル | ||||||
タイトル | Optical Emission Characteristics of Atmospheric-Pressure Nonequilibrium Microwave Discharge and High-Frequency DC Pulse Discharge Plasma Jets | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
キーワード | Ar + N2 mixture gas, high-frequency dc pulse, microwave, plasma jet, vibrational and rotational temperatures | |||||
資源タイプ | ||||||
資源タイプ | journal article | |||||
著者 |
湯地, 敏史
× 湯地, 敏史× Fujii, Shuitsu× Mungkung, Narong× Hiroshi, Akatsuka |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | With an aim to understand the mechanism of surface processing by atmospheric-pressure nonequilibrium discharge plasma jets, we measured the vibrational and rotational temperatures in the plasmas by means of optical emission spectroscopy (OES) measurement method. This paper focuses on the OES measurement method using a torch-shaped atmospheric-pressure nonequilibrium discharge plasma jet power supply consisting of a microwave (2.45-GHz) generator and a high-frequency (5.0–10-kHz) dc pulse power supply, using a gas mixture of Ar (8.0 L/min) and N2 (0.1–0.5 L/min) as the discharge plasma gas, and changing the flow rate of N2 gas at the input power of 100–150 W. Upon comparing vibrational and rotational temperatures (0.18–0.27 eV) determined from the OES measurement method using two types of atmospheric-pressure nonequilibrium discharge plasma jets, results indicate that the microwave discharge plasma jet has considerably low vibrational and rotational temperatures. | |||||
言語 | en | |||||
書誌情報 |
en : IEEE transactions on plasma science 巻 37, 号 6, p. 839-845, 発行日 2009-06 |
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出版者 | ||||||
出版者 | IEEE Nuclear and Plasma Sciences Society | |||||
言語 | en | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00933813 | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA0066803X | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. | |||||
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出版タイプ | VoR |