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場所選択加工したSi 基板を用いたGaAs-NWs の成長
http://hdl.handle.net/10458/5554
http://hdl.handle.net/10458/5554cae7d10e-5bac-41a6-97a1-d8002a3bd83c
名前 / ファイル | ライセンス | アクション |
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本文 (754.1 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2020-06-21 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 場所選択加工したSi 基板を用いたGaAs-NWs の成長 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Site Selective Growth of GaAs-NWs on Patterned Si Substrate | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | GaAs, Nanowires, Si, MBE, VLS | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | バショ センタク カコウ シタ Si キバン オ モチイタ GaAs-NWs ノ セイチョウ | |||||
著者 |
原田, 一徹
× 原田, 一徹× 河瀬, 平雅× 鈴木, 秀俊× 福山, 敦彦× 碇, 哲雄× Harada, Ittetsu× Kawase, Taiga |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Catalyst-free GaAs-nanowire (GaAs-NWs) have been studied . But, It doesn't achieve to growth GaAs-NWs on Si(001) substrate looking toward the opto-electronic integrated circuit (OEIC) and Micro Electro Mechanical systems (MEMS). So we attempted to make site selective growth of GaAs-NWs by using patterned Si substrate and investigated the flux condition of maximum GaAs-NWs density. We found that it is possible to selective growth of GaAs-NWs by patterned Si substrate and GaAs-NWs or GaAs layer morphology depend on Ga flux. For detail, Ga flux and As flux are less than 0.25 [ML/s] and 1.0 [ML/s] for maximum GaAs-NWs density. Additionally, we concluded relation between Ga flux and Ga droplet have an effect on relation between Ga flux and GaAs-NWs density. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 44, p. 5-8, 発行日 2015-07-31 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |