WEKO3
アイテム
{"_buckets": {"deposit": "a1e63518-4faf-4e21-9e49-415fe7c8e9bc"}, "_deposit": {"created_by": 5, "id": "4156", "owners": [5], "pid": {"revision_id": 0, "type": "depid", "value": "4156"}, "status": "published"}, "_oai": {"id": "oai:miyazaki-u.repo.nii.ac.jp:00004156", "sets": ["71", "24"]}, "author_link": ["29", "21580", "27", "21583", "24", "21576", "197", "21581"], "item_10003_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2014-05", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "29", "bibliographicPageEnd": "58", "bibliographicPageStart": "53", "bibliographicVolumeNumber": "2014", "bibliographic_titles": [{"bibliographic_title": "プラズマ研究会資料", "bibliographic_titleLang": "ja"}, {"bibliographic_title": "The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan", "bibliographic_titleLang": "en"}]}]}, "item_10003_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "電気学会", "subitem_publisher_language": "ja"}]}, "item_10003_text_25": {"attribute_name": "BIBID", "attribute_value_mlt": [{"subitem_text_value": "TC10116984"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "津田, 勇", "creatorNameLang": "ja"}, {"creatorName": "ツダ, イサム", "creatorNameLang": "ja-Kana"}, {"creatorName": "Tsuda, Isamu", "creatorNameLang": "en"}], "familyNames": [{"familyName": "津田", "familyNameLang": "ja"}, {"familyName": "ツダ", "familyNameLang": "ja-Kana"}, {"familyName": "Tsuda", "familyNameLang": "en"}], "givenNames": [{"givenName": "勇", "givenNameLang": "ja"}, {"givenName": "イサム", "givenNameLang": "ja-Kana"}, {"givenName": "Isamu", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "21576", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Yuji, Toshifumi", "creatorNameLang": "en"}, {"creatorName": "湯地, 敏史", "creatorNameLang": "ja"}, {"creatorName": "ユジ, トシフミ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Yuji, Tosifumi", "creatorNameLang": "en"}], "familyNames": [{"familyName": "Yuji", "familyNameLang": "en"}, {"familyName": "湯地", "familyNameLang": "ja"}, {"familyName": "ユジ", "familyNameLang": "ja-Kana"}, {"familyName": "Yuji", "familyNameLang": "en"}], "givenNames": [{"givenName": "Toshifumi", "givenNameLang": "en"}, {"givenName": "敏史", "givenNameLang": "ja"}, {"givenName": "トシフミ", "givenNameLang": "ja-Kana"}, {"givenName": "Tosifumi", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "24", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "80418988", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=80418988"}]}, {"creatorNames": [{"creatorName": "木之下, 広幸", "creatorNameLang": "ja"}, {"creatorName": "キノシタ, ヒロユキ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Kinoshita, Hiroyuki", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "29", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "80295196", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=80295196"}]}, {"creatorNames": [{"creatorName": "岡村, 好美", "creatorNameLang": "ja"}, {"creatorName": "オカムラ, ヨシミ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Okamura, Yoshimi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "27", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Nuchuay, Peerapong", "creatorNameLang": "en"}], "familyNames": [{"familyName": "Nuchuay", "familyNameLang": "en"}], "givenNames": [{"givenName": "Peerapong", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "21580", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Thungsuk, Nuttee", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "21581", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Mungkung, Narong", "creatorNameLang": "en"}], "familyNames": [{"familyName": "Mungkung", "familyNameLang": "en"}], "givenNames": [{"givenName": "Narong", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "197", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Kasayapanand, Nat", "creatorNameLang": "en"}], "familyNames": [{"familyName": "Kasayapanand", "familyNameLang": "en"}], "givenNames": [{"givenName": "Nat", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "21583", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "津田, 勇", "creatorNameLang": "ja"}, {"creatorName": "ツダ, イサム", "creatorNameLang": "ja-Kana"}, {"creatorName": "Tsuda, Isamu", "creatorNameLang": "en"}], "familyNames": [{"familyName": "津田", "familyNameLang": "ja"}, {"familyName": "ツダ", "familyNameLang": "ja-Kana"}, {"familyName": "Tsuda", "familyNameLang": "en"}], "givenNames": [{"givenName": "勇", "givenNameLang": "ja"}, {"givenName": "イサム", "givenNameLang": "ja-Kana"}, {"givenName": "Isamu", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "21576", "nameIdentifierScheme": "WEKO"}]}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Ar+O_2混合ガス, フレキシブル太陽電池, プラズマCVD, 表面処理, 低圧, Argon+Oxygen mixture gas, Flexible solar cell, Plasma CVD, Surface treatment, low-pressure", "subitem_subject_language": "ja", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference paper", "resourceuri": "http://purl.org/coar/resource_type/c_5794"}]}, "item_title": "Development of Low-Pressure High-Frequency Plasma Chemical Vapor by Thin Film Deposition System", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Development of Low-Pressure High-Frequency Plasma Chemical Vapor by Thin Film Deposition System", "subitem_title_language": "en"}, {"subitem_title": "低圧高周波プラズマCVDにおける薄膜形成装置の開発", "subitem_title_language": "ja"}]}, "item_type_id": "10003", "owner": "5", "path": ["71", "24"], "permalink_uri": "http://hdl.handle.net/10458/5016", "pubdate": {"attribute_name": "公開日", "attribute_value": "2020-06-21"}, "publish_date": "2020-06-21", "publish_status": "0", "recid": "4156", "relation": {}, "relation_version_is_last": true, "title": ["Development of Low-Pressure High-Frequency Plasma Chemical Vapor by Thin Film Deposition System"], "weko_shared_id": -1}
低圧高周波プラズマCVDにおける薄膜形成装置の開発
http://hdl.handle.net/10458/5016
http://hdl.handle.net/10458/5016a31d2d73-3a2a-4ca3-80a0-113fcac3bb0f
Item type | 会議発表論文 / Conference Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2020-06-21 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Development of Low-Pressure High-Frequency Plasma Chemical Vapor by Thin Film Deposition System | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 低圧高周波プラズマCVDにおける薄膜形成装置の開発 | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | ja | |||||
主題Scheme | Other | |||||
主題 | Ar+O_2混合ガス, フレキシブル太陽電池, プラズマCVD, 表面処理, 低圧, Argon+Oxygen mixture gas, Flexible solar cell, Plasma CVD, Surface treatment, low-pressure | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
津田, 勇
× 津田, 勇× 湯地, 敏史× 木之下, 広幸× 岡村, 好美× Nuchuay, Peerapong× Thungsuk, Nuttee× Mungkung, Narong× Kasayapanand, Nat× 津田, 勇 |
|||||
書誌情報 |
ja : プラズマ研究会資料 en : The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan 巻 2014, 号 29, p. 53-58, 発行日 2014-05 |
|||||
出版者 | ||||||
言語 | ja | |||||
出版者 | 電気学会 |