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一枚型イオンスパッタ金属膜によるき裂長さの測定
http://hdl.handle.net/10458/768
http://hdl.handle.net/10458/76869642f29-3038-43d5-a365-fbe7303b5a20
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
GangDeng18.pdf (1.9 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-10-17 | |||||
| タイトル | ||||||
| タイトル | 一枚型イオンスパッタ金属膜によるき裂長さの測定 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Crack Length Measurement with an Ion Sputtered Metal Film | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| キーワード | Crack Length Measurement, Thin Film, Ion Sputtered Film, Micro-Crack, Fatigue Crack Detection | |||||
| 資源タイプ | ||||||
| 資源タイプ | journal article | |||||
| 著者 |
鄧, 鋼
× 鄧, 鋼× 奈須, 光太郎× 黒岩, 修平× 中西, 勉× Nasu, Koutarou× Kuroiwa, Syuuhei× Nakanishi, Tsutomu |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | This research developed a simple and high precision method to measure the length of a fatigue crack using an extremely thin ion sputtered metal film based on that the electric resistance of the film changes with the increase of the crack. The electric resistance of a cracked film was calculated by the electrothermal FEM analysis. Based on the FEM analysis results, the relationship between the electnc resistance and crack length is expressed by a practical formula. Fatigue crack length measurements for acrylic and metal test specimens were performed on the three-points fatigue test equipment. Based on the good agreements between the measurement results by the ion sputtered film and that by the optical microscope, it is clarified that the crack length measurement method with an ion sputtered metal film has a very high precision. In addition that the measurement system is very simple, this method can be said to have a high practical usability. |
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| 言語 | en | |||||
| 書誌情報 |
ja : 日本機械学會論文集. C編 en : Transactions of the Japan Society of Mechanical Engineers. C 巻 73, 号 727, p. 849-854, 発行日 2007-03 |
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| 出版者 | ||||||
| 出版者 | 日本機械学会 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | The Japan Society of Mechanical Engineers | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 03875024 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AN00187463 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
