ログイン
言語:

WEKO3

  • トップ
  • ランキング
To

Field does not validate



インデックスリンク

インデックスツリー

  • RootNode

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

There is a newer version of this record available.
  1. 教育学部・大学院教育学研究科
  2. その他 (教育学部)

Influence of Electrical and Surface Properties IZO Transparent Conducting Film on PET used by RF Magnetron Sputtering Method at Low Temperature

http://hdl.handle.net/10458/6532
http://hdl.handle.net/10458/6532
7782ae88-2b11-4c61-ac4d-615fbc4b994c
名前 / ファイル ライセンス アクション
p117_icste2018.pdf 本文 (918.6 kB)
Item type 会議発表論文 / Conference Paper(1)
公開日 2020-06-21
タイトル
タイトル Influence of Electrical and Surface Properties IZO Transparent Conducting Film on PET used by RF Magnetron Sputtering Method at Low Temperature
言語 en
言語
言語 eng
キーワード
言語 en
主題Scheme Other
主題 Gas pressure, discharge power, indium zinc oxide, transparent conductive oxide, PET
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_5794
資源タイプ conference paper
著者 Pakpoom, Chansri

× Pakpoom, Chansri

WEKO 30970

en Pakpoom, Chansri

Search repository
Youl, Moon Sung

× Youl, Moon Sung

WEKO 31021

en Youl, Moon Sung

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this paper, we present indium zinc oxide (IZO) conducting thin film used by RF magnetron sputtering method on the condition of gas pressure and discharge power at In2O3:ZnO (90:10wt%) on polyethylene terephthalate (PET) for electronic devices application. The effects of the gas pressure and discharge power by RF magnetron sputtering were studied this experimentally. The surface properties were analyzed by XRD pattern, AFM and FWHM, and the electrical properties were analyzed by the electrical resistivity. IZO films show sharper XRD peaks (222) is located at 2θ = 30.54° at substrate temperature 100℃. The 10 mTorr for gas pressure and 100 W for discharge power are the strongest and optimum, which gives the optical transmittance of 91% and lowest resistivity of ~5.34×10^-4 Ω-cm. The appropriate condition of the used gas pressure and discharge powers in the RF sputtering can be improved the IZO transparent conducting films.
言語 en
書誌情報 en : International Conference on Science, Technology & Education (ICSTE 2018)

p. 117-122, 発行日 2018-09
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
戻る
0
views
See details
Views

Versions

Ver.2 2023-07-30 08:42:44.911151
Ver.1 2023-05-15 12:24:12.442468
Show All versions

Share

Mendeley Twitter Facebook Print Addthis

Cite as

エクスポート

OAI-PMH
  • OAI-PMH JPCOAR 2.0
  • OAI-PMH JPCOAR 1.0
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON
  • BIBTEX

Confirm


Powered by WEKO3


Powered by WEKO3