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Analysis of dynamical properties of Cl2 on GaAs (001) by trajectory simulation
http://hdl.handle.net/10458/363
http://hdl.handle.net/10458/3639cf3195e-1ea5-4923-9f53-e3932740913f
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KJ00003579354.pdf (364.3 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-06-28 | |||||
| タイトル | ||||||
| タイトル | Analysis of dynamical properties of Cl2 on GaAs (001) by trajectory simulation | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | etching, GaAs, Chlorine, trajectory simulation | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| その他（別言語等）のタイトル | ||||||
| その他のタイトル | Analysis of dynamical properties of Cl2 on GaAs (001) by trajectory simulation | |||||
| 言語 | en | |||||
| 著者 |
Shimizu, Yuichiro
× Shimizu, Yuichiro× Ozeki, Masashi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Abstract Dynamical behaviors of Cl2 On GaAs(OO1)-(2x4) surface were studied by a trajectory simulation. A 612-atom five-layer slab of GaAs surface, with periodic boundary conditions in two dimensions, is employed in the calculation. In order to maintain the surface temperature, friction and stochastic forces are included in the simulation program. Pairwise potentials are adopted for the interaction between molecule-surface atoms, inner atoms of molecule, and surface atoms. The simulations well describe the experimental result and provide some important insights into the energy exchange process at surface scattering, trapping/desorption process, and angle-resolved patterns of scattered Cl2 molecule on GaAs surface. |
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| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 34, p. 37-42, 発行日 2005-08 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
