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スパッタリング金属膜によるき裂長さの測定
http://hdl.handle.net/10458/1841
http://hdl.handle.net/10458/1841738afc48-a0f3-41a3-bb72-5e2d8b110af6
名前 / ファイル | ライセンス | アクション |
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本文 (469.6 kB)
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Item type | 会議発表論文 / Conference Paper(1) | |||||
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公開日 | 2020-06-21 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | スパッタリング金属膜によるき裂長さの測定 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Crack Length Measurement by an Ion Sputtered Metal Film | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Crack Length Measurement, Fatigue, Crack Growth Rate, Metal Film | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
資源タイプ | conference paper | |||||
著者 |
鄧, 鋼
× 鄧, 鋼× 堀辺, 大輔× 徳永, 仁夫× 中西, 勉× 池田, 清彦× 海津, 浩一× Horibe, Daisuke× 徳永, 仁夫× 中西, 勉 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This research is to present a new method for fatigue crack length measurement using an ion sputtered film, the thickness of which is several tens nanometer, based on the principle that the electric resistance of the film increases with the growth of a crack. The relationship between the electric resistance and width of the film was investigated and expressed accurately by a presented equation. A grid pattern ion sputtered film was proposed for crack length measurement. Fatigue crack lengths in a bending test specimen are measured with a grid pattern film and a microscope. From the comparisons of the crack length measured by the film and microscope, a good agreement is verified and the availability of the presented method is confirmed. Since the film is extremely thin, it can be used for the measurement of a micro crack as well as crack initiation detection. | |||||
言語 | en | |||||
書誌情報 |
ja : 機素潤滑設計部門講演会講演論文集 en : The Machine Design and Tribology Division meeting in JSME 巻 2004, 号 8, p. 53-54, 発行日 2004-04-16 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 日本機械学会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13483919 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11901260 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |