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ナノピラー（NP）間隔を変化させたSi-NP/SiGe複合膜の熱および光学的特性評価
http://hdl.handle.net/10458/00010267
http://hdl.handle.net/10458/00010267f039d013-e1d5-4277-aa5d-c478696a79cd
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
本文 (1.5 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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| 公開日 | 2021-10-18 | |||||
| タイトル | ||||||
| タイトル | ナノピラー（NP）間隔を変化させたSi-NP/SiGe複合膜の熱および光学的特性評価 | |||||
| 言語 | ja | |||||
| タイトル | ||||||
| タイトル | Evaluation for Optical and Thermal Properties of Si-nanopillars(NPs)/SiGe Composite Film Intentionally Varied NPs Spacing | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Nanostructure | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Thermal conductivity | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| 主題 | Optical absorption | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| 著者 |
安良田, 裕基
× 安良田, 裕基× 原田, 知季× 森田, 浩右× 大堀, 大介× 寒川, 誠二× 碇, 哲雄× 福山, 敦彦× Arata, Yuki× 原田, 知季× Morita, Kosuke× 大堀, 大介× Samukawa, Seiji |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Thermoelectric (TE) devices have been attracted attention because of their importance in converting waste heat into electrical energy. Si-based materials are expected to use as low-cost TE devices. By introducing nanostructure into the TE materials, both low thermal (κ) and high electrical conductivities are required. We have succeeded to fabricate a highly periodic Si-nanopillars (NPs) structure embedded in Si0.7Ge0.3. Bio-template and Neutral-Beam Etching techniques enable us to fabricate the NPs of 10 nm diameter. In this study, we have prepared two samples with different NP spacing of 40 and 60 nm. Our preliminary 3 measurements showed that κ of 40 and 60 nm spacing samples were 2.6 and 2.8 W/mK, respectively. Then, these were 35% lower than that of SiGe bulk material. However, this method requires an electrode as thin as the composite film. This is very difficult to prepare and we should use an electrode of 10 m width. Therefore, another evaluation technique is necessary to estimate κ more accurately. Piezoelectric photothermal (PPT) measurements were carried out to study the effect of NPs spacing on the optical and thermal properties from the non-radiative recombination point of view. The observed PPT signal of the 40 nm spacing sample was 10 times smaller than that of the 60 nm spacing sample. Since the PPT signal depends on κ as well as optical absorption coefficient ( ), we carried out a theoretical calculation based on a one-dimensional heat propagation equation to estimate κ and . However, the calculated results gave us unexpectedly lower κ and higher. A detailed 3-dimensional heat propagation model including carrier diffusion of photo excited carriers should be considered. | |||||
| 言語 | en | |||||
| 書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 50, p. 59-63, 発行日 2021-09-28 |
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| 出版者 | ||||||
| 出版者 | 宮崎大学工学部 | |||||
| 言語 | ja | |||||
| 出版者 | ||||||
| 出版者 | Faculty of Engineering, University of Miyazaki | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 05404924 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00732558 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
