{"created":"2023-05-15T10:01:23.202032+00:00","id":5944,"links":{},"metadata":{"_buckets":{"deposit":"5d95494d-2cac-4666-8f0d-cbab9524684e"},"_deposit":{"created_by":5,"id":"5944","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"5944"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00005944","sets":["71","71:35"]},"author_link":["31880","31881","31882"],"item_10003_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2019-09","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"126","bibliographicPageStart":"123","bibliographic_titles":[{"bibliographic_title":"International Conference on Applied Electrical and Mechanical Engineering 2019","bibliographic_titleLang":"en"}]}]},"item_10003_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The purpose of this research was to the fabrication of ITO thin film was using the spark technique with high voltage on silicon wafer substrate. In order to confirm the ITO surface on silicon wafer substrate, the film was investigated of surface morphology with SEM/EDS. The spark method for fabrication of film was using 10 V of spark voltage, 10 kHz of frequency and 30 minutes of spark time. The sample was annealed difference confirms the formation of ITO thin film on the substrate with result from SEM/EDS. In addition, when the long time annealed as a result of the ITO thin film was better film from a uniform of surface.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10003_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"N., Thungsuk","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"31880","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"B., Kunnalao","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"31881","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"T., Tanaram","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"31882","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"icaeme2019_p123.pdf","filesize":[{"value":"381.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"本文","url":"https://miyazaki-u.repo.nii.ac.jp/record/5944/files/icaeme2019_p123.pdf"},"version_id":"0d1733c6-536b-45f8-8b64-bbe099f15c8c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference paper","resourceuri":"http://purl.org/coar/resource_type/c_5794"}]},"item_title":"A Case Study of Fabrication of Film with Spark Technique","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"A Case Study of Fabrication of Film with Spark Technique","subitem_title_language":"en"}]},"item_type_id":"10003","owner":"5","path":["71","35"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2020-06-21"},"publish_date":"2020-06-21","publish_status":"0","recid":"5944","relation_version_is_last":true,"title":["A Case Study of Fabrication of Film with Spark Technique"],"weko_creator_id":"5","weko_shared_id":-1},"updated":"2024-10-03T06:24:24.194438+00:00"}