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Theoretical and experimental aspects of three-dimensional infrared photothermal radiometry of semiconductors
http://hdl.handle.net/10458/5279
http://hdl.handle.net/10458/527991e68277-ca37-4e2f-84ff-a515c49661f8
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
ikr_5279.pdf (491.3 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2020-06-21 | |||||
| タイトル | ||||||
| タイトル | Theoretical and experimental aspects of three-dimensional infrared photothermal radiometry of semiconductors | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 言語 | en | |||||
| 主題Scheme | Other | |||||
| キーワード | Semiconductors, Photothermal effects, Diffusion, Heat conduction, Integrated circuits | |||||
| 資源タイプ | ||||||
| 資源タイプ | journal article | |||||
| 著者 |
碇, 哲雄
× 碇, 哲雄× Salnick, Alex× Mandelis, Andreas |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A general theoretical model for the infrared photothermal radiometric （PTR） signal from a semiconductor wafer is developed for the case of three-dimensional sample geometry with finite thickness. Carrier diffusion and heat conduction along the radial direction of the sample as well as along the thickness coordinate are taken into account. The simulated results for the modulation frequency dependence of the PTR signal amplitude and phase are applied to experimental data from Si wafers. Good agreement between the theoretical and experimental curves is obtained and several electronic and thermophysical parameters are estimated. This indicates that the three-dimensional PTR measurement is useful to remotely characterize semiconductor wafers patterned for large scale integrated circuits. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | The following article appeared in Journal of Applied Physics. 5/15/1999, Vol. 85 Issue 10, p7392 and may be found at http://dx.doi.org/10.1063/1.369368 | |||||
| 書誌情報 |
Journal of Applied Physics 巻 85, 号 10, p. 7392-7397, 発行日 1999-05-15 |
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| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 00218979 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1999 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
