@techreport{oai:miyazaki-u.repo.nii.ac.jp:00003501,
 author = {原口, 智宏 and Haraguchi, Tomohiro},
 month = {2020-06-21},
 title = {半導体材料の機械研磨 : TEM 用試料の作製に向けて},
 year = {},
 yomi = {ハラグチ, トモヒロ}
}