{"created":"2023-05-15T09:58:56.373526+00:00","id":3004,"links":{},"metadata":{"_buckets":{"deposit":"bfba30cc-4d15-48ad-96bf-43efe69cce41"},"_deposit":{"created_by":5,"id":"3004","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"3004"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00003004","sets":["73","73:36","73:36:330","73:36:330:314"]},"author_link":["6715","16002","16001","15995","15997","6637","6647","15996"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"ヌル ジバ ホウデン プラズマ ニ ヨル アタラシイ スパッタ ソウチ ノ カイハツ"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004-10","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"248","bibliographicPageStart":"243","bibliographicVolumeNumber":"33","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Abstract \nA new type of plasma system based on the magnetic neutral loop discharge (NLD) concept \nhas been developed for sputter application. This system is characterized by plasma production \naround the multi null magnetic field on the electrode surface, where a capacitive RF electric \nfield is applied. From the experimental results and numerical analysis of electron behavior in \nthis system, we found that electrons around the magnetic null region on the target surface \nmoved in meandering orbits like in the original NLD concept. Effective electron heating \naround the null region can be controlled by varying the magnetic flux density of magnets and \ntheir arrangement.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"敦田, 悟","creatorNameLang":"ja"},{"creatorName":"アツタ, サトル","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"15995","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"楊, 鍾煥","creatorNameLang":"ja"}],"nameIdentifiers":[{"nameIdentifier":"15996","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川尻, 晋平","creatorNameLang":"ja"},{"creatorName":"カワシリ, シンペイ","creatorNameLang":"ja-Kana"},{"creatorName":"Kawashiri, Shinpei","creatorNameLang":"en"}],"familyNames":[{"familyName":"川尻","familyNameLang":"ja"},{"familyName":"カワシリ","familyNameLang":"ja-Kana"},{"familyName":"Kawashiri","familyNameLang":"en"}],"givenNames":[{"givenName":"晋平","givenNameLang":"ja"},{"givenName":"シンペイ","givenNameLang":"ja-Kana"},{"givenName":"Shinpei","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"15997","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Sung, Youl-Moon","creatorNameLang":"en"},{"creatorName":"Sung, Youl Moon","creatorNameLang":"en"},{"creatorName":"成, 烈汶","creatorNameLang":"ja"},{"creatorName":"ソン, ヤルブン","creatorNameLang":"ja-Kana"}],"familyNames":[{"familyName":"Sung","familyNameLang":"en"},{"familyName":"Sung","familyNameLang":"en"},{"familyName":"成","familyNameLang":"ja"},{"familyName":"ソン","familyNameLang":"ja-Kana"}],"givenNames":[{"givenName":"Youl-Moon","givenNameLang":"en"},{"givenName":"Youl Moon","givenNameLang":"en"},{"givenName":"烈汶","givenNameLang":"ja"},{"givenName":"ヤルブン","givenNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"6715","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"本田, 親久","creatorNameLang":"ja"},{"creatorName":"ホンダ, チカヒサ","creatorNameLang":"ja-Kana"},{"creatorName":"Honda, Chikahisa","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"6647","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大坪, 昌久","creatorNameLang":"ja"},{"creatorName":"オオツボ, マサヒサ","creatorNameLang":"ja-Kana"},{"creatorName":"Otsubo, Masahisa","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"6637","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Atsuta, Satoru","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"16001","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yang, Jong Hwan","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"16002","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川尻, 晋平","creatorNameLang":"ja"},{"creatorName":"カワシリ, シンペイ","creatorNameLang":"ja-Kana"},{"creatorName":"Kawashiri, Shinpei","creatorNameLang":"en"}],"familyNames":[{"familyName":"川尻","familyNameLang":"ja"},{"familyName":"カワシリ","familyNameLang":"ja-Kana"},{"familyName":"Kawashiri","familyNameLang":"en"}],"givenNames":[{"givenName":"晋平","givenNameLang":"ja"},{"givenName":"シンペイ","givenNameLang":"ja-Kana"},{"givenName":"Shinpei","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"15997","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Sung, Youl-Moon","creatorNameLang":"en"},{"creatorName":"Sung, Youl Moon","creatorNameLang":"en"},{"creatorName":"成, 烈汶","creatorNameLang":"ja"},{"creatorName":"ソン, ヤルブン","creatorNameLang":"ja-Kana"}],"familyNames":[{"familyName":"Sung","familyNameLang":"en"},{"familyName":"Sung","familyNameLang":"en"},{"familyName":"成","familyNameLang":"ja"},{"familyName":"ソン","familyNameLang":"ja-Kana"}],"givenNames":[{"givenName":"Youl-Moon","givenNameLang":"en"},{"givenName":"Youl Moon","givenNameLang":"en"},{"givenName":"烈汶","givenNameLang":"ja"},{"givenName":"ヤルブン","givenNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"6715","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"KJ00002428249.pdf","filesize":[{"value":"1.4 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00002428249.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/3004/files/KJ00002428249.pdf"},"version_id":"f93df579-e429-4025-85df-69a36acb1afe"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Neutral loop discharge (NLD), Multi-null magnetic field","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ヌル磁場放電プラズマによる新しいスパッタ装置の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ヌル磁場放電プラズマによる新しいスパッタ装置の開発","subitem_title_language":"ja"},{"subitem_title":"Development of New Sputter System by Magnetic Null Plasma","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"5","path":["73","36","330","314"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-06-28"},"publish_date":"2007-06-28","publish_status":"0","recid":"3004","relation_version_is_last":true,"title":["ヌル磁場放電プラズマによる新しいスパッタ装置の開発"],"weko_creator_id":"5","weko_shared_id":2},"updated":"2023-11-29T00:46:54.125551+00:00"}