{"created":"2023-05-15T09:58:54.937677+00:00","id":2974,"links":{},"metadata":{"_buckets":{"deposit":"aed67a45-bc9d-4f66-a88e-93bdb12ecebb"},"_deposit":{"created_by":5,"id":"2974","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"2974"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002974","sets":["73","73:36","73:36:330","73:36:330:313"]},"author_link":["15755","15751","7725","12265","17794","12260"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"パルス レー ザー ショウシャ ケッカン ノ ゲッタリング ノウリョク ヒョウカ"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-07","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"29","bibliographicPageStart":"25","bibliographicVolumeNumber":"32","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The pulse laser gettering, which is cleaner and more flexible processing, is investigated. The\ngettering power of the pulse laser induced defects is investigated by ESCA and SEM equipped\nwith EDX. To examine the amount of Cu atoms at several depths in the wafers annealed at from\n700°C to 1000°C after pulse laser irradiation, gettered amount of Cu is precisely mapped along\nthe depth. In the wafer annealed at 700°C, Cu atoms are gettered only at the depth of 300 μm\nfrom the surface. The annealing at elevated temperatures decrease the amount of Cu at 300 μm\nand increase the amount at the shallower and the deeper depths, especially the deeper. And it is\nshown that the annealing at 1000°C can induce considerable gettering at the depth of 200 f1 m,\nwhich may be favorable for the fabrication.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"椛島, 唯士","creatorNameLang":"ja"},{"creatorName":"カバシマ, タダシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"黒木, 正子","creatorNameLang":"ja"},{"creatorName":"クロキ, マサコ","creatorNameLang":"ja-Kana"},{"creatorName":"Kuroki, Masako","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"福森, 太一郎","creatorNameLang":"ja"},{"creatorName":"フクモリ, タイチロウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"明石, 義人","creatorNameLang":"ja"},{"creatorName":"アカシ, ヨシト","creatorNameLang":"ja-Kana"},{"creatorName":"Akashi, Yoshito","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kabashima, Tadashi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"黒木, 正子","creatorNameLang":"ja"},{"creatorName":"クロキ, マサコ","creatorNameLang":"ja-Kana"},{"creatorName":"Kuroki, Masako","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fukumori, Taichiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"KJ00002419414.pdf","filesize":[{"value":"381.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00002419414.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/2974/files/KJ00002419414.pdf"},"version_id":"f5ec4c5e-3747-4eaf-972e-6b3b23f0250d"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Silicon, Heavy metal impurity, Pulse laser induced defect, Gettering","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"パルスレーザー照射欠陥のゲッタリング能力評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"パルスレーザー照射欠陥のゲッタリング能力評価","subitem_title_language":"ja"},{"subitem_title":"Evaluation of Gettering Power of Pulse Laser Induced Defects","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"5","path":["73","36","330","313"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-06-28"},"publish_date":"2007-06-28","publish_status":"0","recid":"2974","relation_version_is_last":true,"title":["パルスレーザー照射欠陥のゲッタリング能力評価"],"weko_creator_id":"5","weko_shared_id":2},"updated":"2023-10-11T05:46:15.711040+00:00"}