{"created":"2023-05-15T09:58:50.999063+00:00","id":2888,"links":{},"metadata":{"_buckets":{"deposit":"c80d9ae0-0650-4ec7-b687-6d621f5e4c56"},"_deposit":{"created_by":5,"id":"2888","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"2888"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002888","sets":["73","73:36","73:36:330","73:36:330:323"]},"author_link":["7290","7289","14196","24421","28621","11920","22140"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"ゲンリョウ キョウキュウ シーケンス ノ チガイ ガ ゲンシソウ エピタキシーホウ ニヨル GaAsN ハクマク セイチョウ ニ アタエル エイキョウ"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2013-08-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"30","bibliographicPageStart":"27","bibliographicVolumeNumber":"42","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"GaAs(N) films have been grown on semi-insulating GaAs(001) substrate at substrate temperatures of 480, 500 and 520 °C by atomic layer epitaxy (ALE). We investigated the effects of gas flow sequences on self-limiting mechanism (SLM), N incorporation, and residual impurities as a first step to grow GaAsN on precisely controlled surface by ALE. N precursor molecules were supplied to Ga (On-Ga) and As terminated surfaces (On-As). The On-As case showed rough surface and their crystal qualities were not good. In On-Ga case, SLM functioned well in whole growth temperature region and On-Ga sample showed low density of residual impurities. These demonstrated that On-Ga sequence is effective to grow GaAsN thin films on precisely controlled surface by ALE technique.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of 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