@article{oai:miyazaki-u.repo.nii.ac.jp:00002832, author = {新宮, 政人 and Shinmiya, Masato and Yoshino, Kenji and 吉野, 賢二 and Ikari, Tetsuo and 碇, 哲雄 and 新宮, 政人 and Shinmiya, Masato}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Jul}, note = {Gallium doped zinc oxide (GZO) films were prepared by ion plating. Heat treatment of the samples was carried out. The samples prepared with a hexagonal wurtzite structure were evaluated by X-ray diffraction, scanning electron microscopy, transmission measurement and hall measurements. GZO films showed a high visible light transparency and the resistivity showed 2.4 × 10-4 Ωcm. Resistivity increased in the Annealing treatment under oxygen atmosphere at 400 ~ 500 ℃. This was considered to contribute to the reduction of surface oxygen vacancies.}, pages = {71--74}, title = {Gaを添加した酸化亜鉛膜の熱処理効果}, volume = {40}, year = {2011}, yomi = {シンミヤ, マサト and ヨシノ, ケンジ and イカリ, テツオ and シンミヤ, マサト} }