@article{oai:miyazaki-u.repo.nii.ac.jp:00002782.1, author = {井手, 亜貴子 and 小嶋, 稔 and 吉野, 賢二 and Yoshino, Kenji and Ide, Akiko and Oshima, Minoru}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Aug}, note = {Growth of ZnO films using diethylzinc (DEZ) was carried out by spray pyrolysis method at room temperature (RT) ~300℃. ZnO films were successfully grown at RT and indicated polycrystalline and hexagonal wurtzite structure. Additionally, a sample grown above 100℃ was obtained ZnO film with high density from FT-IR and optical transmittance.}, pages = {89--94}, title = {スプレー熱分解法による酸化亜鉛薄膜の低温大気作製}, volume = {42}, year = {2013}, yomi = {イデ, アキコ and オシマ, ミノル and ヨシノ, ケンジ} }