@article{oai:miyazaki-u.repo.nii.ac.jp:00002716, author = {正木, 宏和 and Masaki, Hirokazu and Maeda, Koji and 前田, 幸治 and Maeda, Kouji and 境, 貴洋 and 尾関, 雅志 and Ozeki, Masashi and 鈴木, 秀俊 and Suzuki, Hidetoshi and 正木, 宏和 and Masaki, Hirokazu and Sakai, Kentaro}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Jul}, note = {The crystal structure of Ca_1-xSr_xF_2 films (x =0.3~0.7) grown on GaAs(001) by molecular beam epitaxy was studied. The composition of Ca_1-xSr_xF_2 film was changed by SrF_2 cells temperature. The film thickness were 100 to 300 nm. The lattice constants of <001> and <110> direction of the films were determined by rocking curve measurement, the (004) and (224) reciprocal lattice maps by the high resolution X-ray diffractometry. The lattice constants of both directions increased as the SrF_2 composition increasing. The lattice constant of the films which was expected for the 0.1% lattice mismatched could be measured.}, pages = {155--159}, title = {高分解能X線回折法によるGaAs基板上のフッ化物薄膜結晶の評価}, volume = {41}, year = {2012}, yomi = {マサキ, ヒロカズ and マエダ, コウジ and サカイ, タカヒロ and オゼキ, マサシ and スズキ, ヒデトシ and マサキ, ヒロカズ} }