@article{oai:miyazaki-u.repo.nii.ac.jp:00002716.1, author = {正木, 宏和 and Maeda, Koji and 前田, 幸治 and Maeda, Kouji and 境, 貴洋 and 尾関, 雅志 and Ozeki, Masashi and 鈴木, 秀俊 and Suzuki, Hidetoshi and Masaki, Hirokazu and Sakai, Kentaro}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Jul}, note = {The crystal structure of Ca_1-xSr_xF_2 films (x =0.3~0.7) grown on GaAs(001) by molecular beam epitaxy was studied. The composition of Ca_1-xSr_xF_2 film was changed by SrF_2 cells temperature. The film thickness were 100 to 300 nm. The lattice constants of <001> and <110> direction of the films were determined by rocking curve measurement, the (004) and (224) reciprocal lattice maps by the high resolution X-ray diffractometry. The lattice constants of both directions increased as the SrF_2 composition increasing. The lattice constant of the films which was expected for the 0.1% lattice mismatched could be measured.}, pages = {155--159}, title = {高分解能X線回折法によるGaAs基板上のフッ化物薄膜結晶の評価}, volume = {41}, year = {2012}, yomi = {マサキ, ヒロカズ and マエダ, コウジ and サカイ, タカヒロ and オゼキ, マサシ and スズキ, ヒデトシ} }