{"created":"2023-05-15T10:38:33.947199+00:00","links":{},"metadata":{"_buckets":{"deposit":"da254cf3-291d-47e2-82af-4b4b9650e17a"},"_deposit":{"id":"2677.1","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"2677.1"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002677.1","sets":["73","73:36","73:36:330:318"]},"author_link":["11920","13932","13933","13935","13936"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Dynamical behavior of methylchloride on GaAs(001)","subitem_alternative_title_language":"en"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2008-08-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"139","bibliographicPageStart":"135","bibliographicVolumeNumber":"37","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The dynamical behavior of methylchloride (CH3Cl), which is an important precursor in the atomic order etching of III-V compounds, was studied on a GaAs(001)-2x4 surface using a supersonic molecular beam. Direct scattering and trapping/desorption channels of incident CH3Cl were assigned based on a detailed analysis of incident energy and angle dependence of the scattered molecule. A large energy exchange from translational to rotational modes was observed for directly scattered CH3Cl. A trajectory simulation was conducted to quantitatively explain the angle dependence of scattered CH3Cl, energy exchange at collision, and the energy dependence of trapping probability on the surface.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"尾関, 雅志","creatorNameLang":"ja"},{"creatorName":"オゼキ, マサシ","creatorNameLang":"ja-Kana"},{"creatorName":"Ozeki, Masashi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"冨川, 満広"},{"creatorName":"トミカワ, ミツヒロ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"鬼塚, 尚幸","creatorNameLang":"ja"},{"creatorName":"オニツカ, ナオユキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Tomikawa, Mitsuhiro","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Onitsuka, Naoyuki","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"KJ00005015945.pdf","filesize":[{"value":"138.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00005015945.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/2677.1/files/KJ00005015945.pdf"},"version_id":"6e2a8b21-b6a5-433c-99f8-fae25c5ee723"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Atom-solid interactions, scattering, Molecule-solid scattering, Gallium arsenide, Chemisorption, Physical adsorption, Methylchloride","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Dynamical behavior of methylchloride on GaAs(001)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Dynamical behavior of methylchloride on GaAs(001)","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"2","path":["36","73","318"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-11-11"},"publish_date":"2008-11-11","publish_status":"0","recid":"2677.1","relation_version_is_last":true,"title":["Dynamical behavior of methylchloride on GaAs(001)"],"weko_creator_id":"2","weko_shared_id":2},"updated":"2023-07-29T11:25:20.092155+00:00"}