{"created":"2023-05-15T09:58:37.774233+00:00","id":2616,"links":{},"metadata":{"_buckets":{"deposit":"e3940e0c-2c43-4827-8560-28f1918dcad8"},"_deposit":{"created_by":5,"id":"2616","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"2616"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002616","sets":["73","73:36","73:36:330","73:36:330:323"]},"author_link":["17794","13492","13490"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"パルス レーザー ショウシャ ケッカン ノ EDX ニヨル ヒョウカ","subitem_alternative_title_language":"ja-Kana"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2013-08-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"34","bibliographicPageStart":"31","bibliographicVolumeNumber":"42","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Gettering effect of defects induced by pulsed laser irradiation is studied. Pulsed laser irradiated Si-wafer(back surface) is annealed at 800℃for 30min and intentionally contaminated by Cu diffusion. Cu atoms gettered by defects are analyzed by EDX (Energy Dispersive X-ray Spectroscopy). Each depth of 50μm, 100μm, 200μm, 300μm, 350μm from back surface is measured. From the results of depth profile, it was found that at the depth of 350μm, getter sinks were formed at the apart from the center and at the depth of the 200μm, were at the center part.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"黒木, 正子","creatorNameLang":"ja"},{"creatorName":"クロキ, マサコ","creatorNameLang":"ja-Kana"},{"creatorName":"Kuroki, Masako","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"工藤, 大輔"},{"creatorName":"クドウ, ダイスケ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"黒木, 正子","creatorNameLang":"ja"},{"creatorName":"クロキ, マサコ","creatorNameLang":"ja-Kana"},{"creatorName":"Kuroki, Masako","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kudo, Daisuke","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"engineering31-34.pdf","filesize":[{"value":"887.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"engineering31-34.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/2616/files/engineering31-34.pdf"},"version_id":"3ec34fed-819f-4887-9d02-01c63081e1be"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"gettering, pulsed laser irradiation, Si-wafer, EDX, getter sink","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"パルスレーザー照射欠陥のEDXによる評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"パルスレーザー照射欠陥のEDXによる評価","subitem_title_language":"ja"},{"subitem_title":"EDX Evaluation of Defects Induced by Pulsed Laser Irradiation","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"5","path":["73","36","330","323"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2013-12-25"},"publish_date":"2013-12-25","publish_status":"0","recid":"2616","relation_version_is_last":true,"title":["パルスレーザー照射欠陥のEDXによる評価"],"weko_creator_id":"5","weko_shared_id":2},"updated":"2023-10-11T05:46:16.827386+00:00"}