@article{oai:miyazaki-u.repo.nii.ac.jp:00002606, author = {小嶋, 稔 and Oshima, Minoru and 新宮, 政人 and Shinmiya, Masato and Yoshino, Kenji and 吉野, 賢二 and Ikari, Tetsuo and 碇, 哲雄 and 小嶋, 稔 and Oshima, Minoru and 新宮, 政人 and Shinmiya, Masato}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Jul}, note = {Non-doped ZnO films on a glass substrate have been successfully grown by conventional spin coating at room temperature ~ 500°C using a diethyl zinc (DEZn) based solution. The samples have an optical transmittance of more than 80%, and a smooth surface determined from optical transmittance and scanning electron microscopy, respectively. The each parameter of spin coating were determined in following, rotational speed is 1500 rpm, drying time is 30 sec, baking temperature is room temperature ~ 500°C and heating time is 5 min.}, pages = {123--127}, title = {スピンコート法による酸化亜鉛薄膜作製}, volume = {41}, year = {2012}, yomi = {オシマ, ミノル and シンミヤ, マサト and ヨシノ, ケンジ and イカリ, テツオ and オシマ, ミノル and シンミヤ, マサト} }