{"created":"2023-05-15T09:58:29.307738+00:00","id":2454,"links":{},"metadata":{"_buckets":{"deposit":"fc751cbd-2580-4c1a-81f8-66dda6f1295d"},"_deposit":{"created_by":5,"id":"2454","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"2454"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002454","sets":["73","73:36","73:36:330","73:36:330:316"]},"author_link":["6715","12405","15997","6637","6647","12398","12399","12404"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"ジキ チュウセイセン ホウデン プラズマ オ モチイタ カーボン ナノチューブ ノ サクセイ","subitem_alternative_title_language":"ja-Kana"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2006-08-30","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"106","bibliographicPageStart":"101","bibliographicVolumeNumber":"35","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Recently, the big diameter making of the wafer is rapidly advanced with the ultrafine processing\ntechnology of 0.1μm in the minimum in recent semiconductor manufacturing process line width in the\nprocess of the semiconductor. Then, the plasma source by which a uniform process in a large area can\nbe done is requested. Then, the NLD (Neutral Loop Discharge) plasma was proposed. Because the\nNLD plasma can dynamically control impossible plasma in past plasma, a highly effective process\ncan be done. However, it is a current state of being limited from the structure only to the etching field\nnow, We have aimed to pioneer the NLD plasma to a new field by applying a peculiar concept of the\nNLD plasma to the CNT (Carbon Nanotubes) making.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川尻, 晋平","creatorNameLang":"ja"},{"creatorName":"カワシリ, シンペイ","creatorNameLang":"ja-Kana"},{"creatorName":"Kawashiri, Shinpei","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"楊, 鍾煥"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"井上, 大士","creatorNameLang":"ja"},{"creatorName":"イノウエ, ダイシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Sung, Youl-Moon","creatorNameLang":"en"},{"creatorName":"Sung, Youl Moon","creatorNameLang":"en"},{"creatorName":"成, 烈汶","creatorNameLang":"ja"},{"creatorName":"ソン, ヤルブン","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{},{}],"givenNames":[{},{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"大坪, 昌久","creatorNameLang":"ja"},{"creatorName":"オオツボ, マサヒサ","creatorNameLang":"ja-Kana"},{"creatorName":"Otsubo, Masahisa","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"本田, 親久"},{"creatorName":"ホンダ, チカヒサ","creatorNameLang":"ja-Kana"},{"creatorName":"Honda, Chikahisa","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"川尻, 晋平","creatorNameLang":"ja"},{"creatorName":"カワシリ, シンペイ","creatorNameLang":"ja-Kana"},{"creatorName":"Kawashiri, Shinpei","creatorNameLang":"en"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yang, Jong Hwan","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Inoue, Daishi","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Sung, Youl-Moon","creatorNameLang":"en"},{"creatorName":"Sung, Youl Moon","creatorNameLang":"en"},{"creatorName":"成, 烈汶","creatorNameLang":"ja"},{"creatorName":"ソン, ヤルブン","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{},{}],"givenNames":[{},{},{},{}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"KJ00004439496.pdf","filesize":[{"value":"1.5 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00004439496.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/2454/files/KJ00004439496.pdf"},"version_id":"0ea34f5a-00e0-4730-bc46-4347d163b375"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Neural Loop Discharge(NLD), Carbon Nanotubes(CNT)","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"磁気中性線放電プラズマを用いたカーボンナノチューブの作製","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"磁気中性線放電プラズマを用いたカーボンナノチューブの作製","subitem_title_language":"ja"},{"subitem_title":"Production of Carbon Nanotubes by Neutral Loop Discharge Plasma","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"5","path":["73","36","330","316"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-06-28"},"publish_date":"2007-06-28","publish_status":"0","recid":"2454","relation_version_is_last":true,"title":["磁気中性線放電プラズマを用いたカーボンナノチューブの作製"],"weko_creator_id":"5","weko_shared_id":2},"updated":"2023-11-29T00:46:54.400517+00:00"}