{"created":"2023-05-15T09:58:29.264246+00:00","id":2453,"links":{},"metadata":{"_buckets":{"deposit":"f581ee83-fdcb-404e-8fa5-d4b56f2f1000"},"_deposit":{"created_by":5,"id":"2453","owner":"5","owners":[5],"pid":{"revision_id":0,"type":"depid","value":"2453"},"status":"published"},"_oai":{"id":"oai:miyazaki-u.repo.nii.ac.jp:00002453","sets":["73","73:36","73:36:330","73:36:330:313"]},"author_link":["12388","12394","12038","12037","12392","12389","12041","12396","12387","12393"],"item_10002_alternative_title_1":{"attribute_name":"その他（別言語等）のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"ヒコウ ジカンガタ シツリョウ ブンセキホウ ニ ヨル ヒョウメン ビリョウ ブンセキ ギジュツ ノ カイハツ","subitem_alternative_title_language":"ja-Kana"}]},"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2003-07","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"113","bibliographicPageStart":"107","bibliographicVolumeNumber":"32","bibliographic_titles":[{"bibliographic_title":"宮崎大学工学部紀要","bibliographic_titleLang":"ja"},{"bibliographic_title":"Memoirs of Faculty of Engineering, University of Miyazaki","bibliographic_titleLang":"en"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Abstract \nAccording as element densities in electronic circuit have become extremely high in recent \nyears, it is important to understand the information about surfaces and interfaces of materials. \nThen, systems having topography and composition analyses are required. In this research, we \ntried to build a compact and low price surface microanalysis system using laser ablation \nionization and time of flight mass spectrometer (TOF-MS). The mass resolution of the produced \nequipment was two or less in mass-to-charge ratio. The minimum volume of mass for detection \nwas 3.3pg. We measured species and ablation threshold from natural silicon wafer and silica \nglass. Based on the results, we explained the thermal dissociation mechanisms of silicon wafer \nwith the oxide film. We performed quantitative analysis for 4% BF2+ doped silicon wafer and \ncould determine the B+ composition.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"宮崎大学工学部","subitem_publisher_language":"ja"},{"subitem_publisher":"Faculty of Engineering, University of Miyazaki","subitem_publisher_language":"en"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA00732558","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"05404924","subitem_source_identifier_type":"ISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"吉岡, 章夫","creatorNameLang":"ja"},{"creatorName":"ヨシオカ, アキオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"上村, 一秀"},{"creatorName":"ウエムラ, カズヒデ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"柳田, 英明"},{"creatorName":"ヤナギタ, ヒデアキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"黒澤, 宏","creatorNameLang":"ja"},{"creatorName":"クロサワ, コウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"Yokotani, Atsushi","creatorNameLang":"en"},{"creatorName":"横谷, 篤至","creatorNameLang":"ja"},{"creatorName":"ヨコタニ, アツシ","creatorNameLang":"ja-Kana"}],"familyNames":[{},{},{}],"givenNames":[{},{},{}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Yoshioka, Akio","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Uemura, Kazuhide","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yanagita, Hideaki","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Kurosawa, Kou","creatorNameLang":"en"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yokotani, Atushi","creatorNameLang":"en"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-06-21"}],"displaytype":"detail","filename":"KJ00002425500.pdf","filesize":[{"value":"539.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KJ00002425500.pdf","url":"https://miyazaki-u.repo.nii.ac.jp/record/2453/files/KJ00002425500.pdf"},"version_id":"bb7a906f-43f7-4fdf-bd60-ad2a71f75804"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Time of flight mass spectrometer, Laser ablation ionization, Composition analysis, Microanalysis system","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"飛行時間型質量分析法による表面微量分析技術の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"飛行時間型質量分析法による表面微量分析技術の開発","subitem_title_language":"ja"},{"subitem_title":"Development of Surface Microanalysis technology by Time of Flight Mass Spectrometry","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"5","path":["73","36","330","313"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-06-28"},"publish_date":"2007-06-28","publish_status":"0","recid":"2453","relation_version_is_last":true,"title":["飛行時間型質量分析法による表面微量分析技術の開発"],"weko_creator_id":"5","weko_shared_id":2},"updated":"2023-09-06T06:19:48.345750+00:00"}