@article{oai:miyazaki-u.repo.nii.ac.jp:00002405, author = {Matsuo, Hitoshi and 松尾, 整 and 掛野, 崇 and Kakeno, Takashi and Yoshino, Kenji and 吉野, 賢二 and Ikari, Tetsuo and 碇, 哲雄 and Matsuo, Hitoshi and 松尾, 整 and 掛野, 崇 and Kakeno, Takashi}, journal = {宮崎大学工学部紀要, Memoirs of Faculty of Engineering, University of Miyazaki}, month = {Aug}, note = {Abstract We prepared AgGaSe2 thin films by vacuum evaporation using binary materials of Ag2Se and Ga2Se3. After the evaporation, these samples were annealed from 100 ℃ to 600 ℃ for 10 minute in Nitrogen atmosphere. These samples were evaluated by X-ray diffraction, surface morphology, optical properties and electrical properties. The sample annealed at 600 ℃ showed a single phase AgGaSe2. This grain size was larger than any other samples. Thermoprobe analyze showed n-type conduction. It was assumed that as-deposition sample and the samples annealed at low temperature had many donor defects of Se vacancy. Furthermore carrier concentration decreases with increasing annealing temperature, because a number of accepter defect Ag vacancy increases with annealing temperature, as a result these showed high resistivity.}, pages = {121--126}, title = {真空蒸着法によるAgGaSe2薄膜作成と評価}, volume = {34}, year = {2005}, yomi = {マツオ, ヒトシ and カケノ, タカシ and ヨシノ, ケンジ and イカリ, テツオ and マツオ, ヒトシ and カケノ, タカシ} }