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ラマン散乱法を用いた有機金属気相成長法で作製したInAs/GaSb超格子の層厚依存性の評価
http://hdl.handle.net/10458/00010075
http://hdl.handle.net/10458/00010075522da575-aa23-4a42-94a8-74e156d3fd56
名前 / ファイル | ライセンス | アクション |
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本文 (1.4 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2020-10-30 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | ラマン散乱法を用いた有機金属気相成長法で作製したInAs/GaSb超格子の層厚依存性の評価 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | The layer thickness dependence of InAs/GaSb superlattices grown by metalorganic chemical vapor deposition evaluated by Raman scattering method | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | MOVPE | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | InAs/GaSb | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Superlattice | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Raman | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | phonon | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | mixed crystal | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者 |
浅生, 大輝
× 浅生, 大輝× 大石, 優貴× 今村, 優希× 荒井, 昌和× 前田, 幸治× 浅生, 大輝× 大石, 優貴× 今村, 優希 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | InAs/GaSb superlattices(SL) with systematic change of layer thickness grown by metalorganic chemical vapor deposition analyzed by Raman scattering method. As a result, a change in the peak shape of the Raman spectrum was observed in the superlattices having different film thicknesses. In the InAs/GaSb superlattices, a peak due to Ga-As atomic bonds that does not exist as a composition of SL was confirmed. When the layer thickness was smaller, the degree of mixing of As into the GaSb layer increased due to the influence of the residual gas. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 49, p. 69-72, 発行日 2020-09 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |