WEKO3
アイテム
{"_buckets": {"deposit": "599dea10-d56c-40e3-adcc-23bcb6c0a433"}, "_deposit": {"created_by": 5, "id": "2893", "owner": "5", "owners": [5], "pid": {"revision_id": 0, "type": "depid", "value": "2893"}, "status": "published"}, "_oai": {"id": "oai:miyazaki-u.repo.nii.ac.jp:00002893", "sets": ["36", "73", "319", "330"]}, "author_link": ["13738", "15288", "15291", "12047", "15287", "13733"], "item_10002_alternative_title_1": {"attribute_name": "その他(別言語等)のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "スパッタホウ ニヨル SiC:H ハクマク ノ コウガク・デンキトクセイ ニオケル コウシュウハ デンリョク イゾンセイ"}]}, "item_10002_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-09-30", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "38", "bibliographicPageStart": "31", "bibliographicVolumeNumber": "38", "bibliographic_titles": [{"bibliographic_title": "宮崎大学工学部紀要", "bibliographic_titleLang": "ja"}, {"bibliographic_title": "Memoirs of Faculty of Engineering, University of Miyazaki", "bibliographic_titleLang": "en"}]}]}, "item_10002_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "SiC:H films have been deposited by reactive r.f. magnetron sputtering of Si target in hydrogen and methane (diluted by argon) gas mixtures. The effects of hydrogen partial pressme ratio R_H and r.f. power P on the structural, optical, and electrical properties of the films were investigated. With increasing R_H above 90%, a weak SiC (110) peak was observed by X-ray diffraction around 2 θ=60°. On the basis of this condition, the dependence of r.f power P was examined. As a result, it was found that mlcrocrystallization was enhanced by increasing r.f. power.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10002_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "宮崎大学工学部", "subitem_publisher_language": "ja"}, {"subitem_publisher": "Faculty of Engineering, University of Miyazaki", "subitem_publisher_language": "en"}]}, "item_10002_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA00732558", "subitem_source_identifier_type": "NCID"}]}, "item_10002_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "05404924", "subitem_source_identifier_type": "ISSN"}]}, "item_10002_text_25": {"attribute_name": "BIBID", "attribute_value_mlt": [{"subitem_text_value": "TC00002886"}]}, "item_10002_text_26": {"attribute_name": "登録日", "attribute_value_mlt": [{"subitem_text_value": "2009/10/29"}]}, "item_10002_textarea_24": {"attribute_name": "来歴", "attribute_value_mlt": [{"subitem_textarea_value": "Submitted by dspace dspace (lib-ir@of.miyazaki-u.ac.jp) on 2009-10-29T04:36:45Z\nNo. of bitstreams: 2\nlicence.pdf: 24474 bytes, checksum: ffda027e83e1c8d1daa69d4fd24957a0 (MD5)\nKJ00005628508.pdf: 2957397 bytes, checksum: 1e001476acc92c66b405cdd3c11af5a7 (MD5)"}, {"subitem_textarea_value": "Approved for entry into archive by dspace dspace(lib-ir@of.miyazaki-u.ac.jp) on 2009-10-29T07:17:26Z (GMT) No. of bitstreams: 2\nlicence.pdf: 24474 bytes, checksum: ffda027e83e1c8d1daa69d4fd24957a0 (MD5)\nKJ00005628508.pdf: 2957397 bytes, checksum: 1e001476acc92c66b405cdd3c11af5a7 (MD5)"}, {"subitem_textarea_value": "Made available in DSpace on 2009-10-29T07:17:26Z (GMT). No. of bitstreams: 2\nlicence.pdf: 24474 bytes, checksum: ffda027e83e1c8d1daa69d4fd24957a0 (MD5)\nKJ00005628508.pdf: 2957397 bytes, checksum: 1e001476acc92c66b405cdd3c11af5a7 (MD5)\n Previous issue date: 2009-09-30"}]}, "item_10002_version_type_20": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "山脇, 翔太", "creatorNameLang": "ja"}, {"creatorName": "ヤマワキ, ショウタ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "15287", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "齋藤, 順雄", "creatorNameLang": "ja"}, {"creatorName": "サイトウ, ノブオ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Saito, Nobuo", "creatorNameLang": "en"}], "familyNames": [{"familyName": "齋藤", "familyNameLang": "ja"}, {"familyName": "サイトウ", "familyNameLang": "ja-Kana"}, {"familyName": "Saito", "familyNameLang": "en"}], "givenNames": [{"givenName": "順雄", "givenNameLang": "ja"}, {"givenName": "ノブオ", "givenNameLang": "ja-Kana"}, {"givenName": "Nobuo", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "15288", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "Maeda, Koji", "creatorNameLang": "en"}, {"creatorName": "前田, 幸治", "creatorNameLang": "ja"}, {"creatorName": "マエダ, コウジ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Maeda, Kouji", "creatorNameLang": "en"}], "familyNames": [{"familyName": "Maeda", "familyNameLang": "en"}, {"familyName": "前田", "familyNameLang": "ja"}, {"familyName": "マエダ", "familyNameLang": "ja-Kana"}, {"familyName": "Maeda", "familyNameLang": "en"}], "givenNames": [{"givenName": "Koji", "givenNameLang": "en"}, {"givenName": "幸治", "givenNameLang": "ja"}, {"givenName": "コウジ", "givenNameLang": "ja-Kana"}, {"givenName": "Kouji", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "12047", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "50219268", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=50219268"}]}, {"creatorNames": [{"creatorName": "西岡, 賢祐", "creatorNameLang": "ja"}, {"creatorName": "ニシオカ, ケンスケ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "13733", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "00377441", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=00377441"}]}, {"creatorNames": [{"creatorName": "Yamawaki, Shota", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "15291", "nameIdentifierScheme": "WEKO"}]}, {"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "齋藤, 順雄", "creatorNameLang": "ja"}, {"creatorName": "サイトウ, ノブオ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Saito, Nobuo", "creatorNameLang": "en"}], "familyNames": [{"familyName": "齋藤", "familyNameLang": "ja"}, {"familyName": "サイトウ", "familyNameLang": "ja-Kana"}, {"familyName": "Saito", "familyNameLang": "en"}], "givenNames": [{"givenName": "順雄", "givenNameLang": "ja"}, {"givenName": "ノブオ", "givenNameLang": "ja-Kana"}, {"givenName": "Nobuo", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "15288", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nishioka, Kensuke", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13738", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2020-06-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "KJ00005628508.pdf", "filesize": [{"value": "3.0 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 3000000.0, "url": {"label": "KJ00005628508.pdf", "url": "https://miyazaki-u.repo.nii.ac.jp/record/2893/files/KJ00005628508.pdf"}, "version_id": "6ad46b4c-5949-4b57-acbc-142bdac982f1"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Sputtering, SiC, Amorphous, Microcrystallization", "subitem_subject_language": "en", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "スパッタ法によるSiC:H薄膜の光学・電気特性における高周波電力依存性", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "スパッタ法によるSiC:H薄膜の光学・電気特性における高周波電力依存性", "subitem_title_language": "ja"}, {"subitem_title": "R.F. Power Dependence on Optical and Electrical Properties of SiC:H Films Prepared by Magnetron Sputtering", "subitem_title_language": "en"}]}, "item_type_id": "10002", "owner": "5", "path": ["73", "36", "330", "319"], "permalink_uri": "http://hdl.handle.net/10458/2375", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2009-10-29"}, "publish_date": "2009-10-29", "publish_status": "0", "recid": "2893", "relation": {}, "relation_version_is_last": true, "title": ["スパッタ法によるSiC:H薄膜の光学・電気特性における高周波電力依存性"], "weko_shared_id": 2}
スパッタ法によるSiC:H薄膜の光学・電気特性における高周波電力依存性
http://hdl.handle.net/10458/2375
http://hdl.handle.net/10458/2375ca350c3f-78a9-4e27-95a8-0fe9595d37ff
名前 / ファイル | ライセンス | アクション |
---|---|---|
KJ00005628508.pdf (3.0 MB)
|
|
Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2009-10-29 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | スパッタ法によるSiC:H薄膜の光学・電気特性における高周波電力依存性 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | R.F. Power Dependence on Optical and Electrical Properties of SiC:H Films Prepared by Magnetron Sputtering | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Sputtering, SiC, Amorphous, Microcrystallization | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | スパッタホウ ニヨル SiC:H ハクマク ノ コウガク・デンキトクセイ ニオケル コウシュウハ デンリョク イゾンセイ | |||||
著者 |
山脇, 翔太
× 山脇, 翔太× 齋藤, 順雄× 前田, 幸治× 西岡, 賢祐× Yamawaki, Shota× 齋藤, 順雄× Nishioka, Kensuke |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | SiC:H films have been deposited by reactive r.f. magnetron sputtering of Si target in hydrogen and methane (diluted by argon) gas mixtures. The effects of hydrogen partial pressme ratio R_H and r.f. power P on the structural, optical, and electrical properties of the films were investigated. With increasing R_H above 90%, a weak SiC (110) peak was observed by X-ray diffraction around 2 θ=60°. On the basis of this condition, the dependence of r.f power P was examined. As a result, it was found that mlcrocrystallization was enhanced by increasing r.f. power. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 38, p. 31-38, 発行日 2009-09-30 |
|||||
出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |