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Si(111)表面へのIII族供給によるGaAs薄膜中の回転双晶軽減
http://hdl.handle.net/10458/4695
http://hdl.handle.net/10458/469509896a40-def0-4c4b-9c12-ba2d6a596cfd
名前 / ファイル | ライセンス | アクション |
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engineering19-22.pdf (727.4 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-12-24 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | Si(111)表面へのIII族供給によるGaAs薄膜中の回転双晶軽減 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Reduction of Rotational Twin Formation in GaAs by Irradiation of Group III Atoms to Si (111) Substrate | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Rotational twin formation in GaAs, GaAs on Si, molecular beam epitaxy, hetero-epitaxy | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Si(111) ヒョウメン エノ IIIゾク キョウキュウ ニヨル GaAs ハクマクチュウ ノ カイテン ソウショウ ケイゲン | |||||
著者 |
伊東, 大樹
× 伊東, 大樹× 太刀掛, 弘晃× 鈴木, 秀俊× 福山, 敦彦× 碇, 哲雄× 伊東, 大樹× Tachikake, Hiroaki |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We tried to reduce the domain of rotational twin in GaAs layer grown on Si (111) substrate by pre-evaporation of group III atoms before the layer growth. Ga and In atoms were used as pre-evaporating materials. GaAs layers were grown by conventional molecular beam method under various V/III ratios. By Ga pre-evaporation method, the domain of rotational twin increased. In contrast, the twin domain decreased by In pre-evaporation method. We found that the In pre-evaporation method was effective at V/III ratios between 30 and 100. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 42, p. 19-22, 発行日 2013-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |