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高分解能X線回折法によるGaAs基板上のフッ化物薄膜結晶の評価
http://hdl.handle.net/10458/4112
http://hdl.handle.net/10458/411264b851d9-cb67-4dc7-9437-3a2e5219b2d2
名前 / ファイル | ライセンス | アクション |
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engineering41_155-159.pdf (1.0 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2012-10-31 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 高分解能X線回折法によるGaAs基板上のフッ化物薄膜結晶の評価 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Structure Analysis of Fluoride Crystal on GaAs by High-Resolution X-ray Diffractometry | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | HRXRD, Reciprocal lattice map, MBE, Epitaxial grown | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | コウブンカイノウ Xセン カイセキホウ ニヨル GaAs キバンジョウ ノ フッカブツ ハクマク ケッショウ ノ ヒョウカ | |||||
言語 | ja-Kana | |||||
著者 |
正木, 宏和
× 正木, 宏和× 前田, 幸治× 境, 貴洋× 尾関, 雅志× 鈴木, 秀俊× 正木, 宏和× Sakai, Kentaro |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The crystal structure of Ca_1-xSr_xF_2 films (x =0.3~0.7) grown on GaAs(001) by molecular beam epitaxy was studied. The composition of Ca_1-xSr_xF_2 film was changed by SrF_2 cells temperature. The film thickness were 100 to 300 nm. The lattice constants of <001> and <110> direction of the films were determined by rocking curve measurement, the (004) and (224) reciprocal lattice maps by the high resolution X-ray diffractometry. The lattice constants of both directions increased as the SrF_2 composition increasing. The lattice constant of the films which was expected for the 0.1% lattice mismatched could be measured. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 41, p. 155-159, 発行日 2012-07-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |