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原子層エピタキシー法により作製したGaAs薄膜の評価
http://hdl.handle.net/10458/1626
http://hdl.handle.net/10458/1626c5555d80-ef67-4fcb-9dfc-d71dace552a7
名前 / ファイル | ライセンス | アクション |
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KJ00005016021.pdf (182.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-11-11 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 原子層エピタキシー法により作製したGaAs薄膜の評価 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Growth condition of Homoepitaxial GaAs layers grown by Atomic Layer Epitaxy | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | atomic layer epitaxy, GaAs, homoepitaxial growth, Photoluminescence, Raman scattering, Coupled Plasmon-LO-Phonon modes | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | ゲンシソウ エピタキシーホウ ニ ヨリ サクセイ シタ GaAsハクマク ノ ヒョウカ | |||||
言語 | ja-Kana | |||||
著者 |
藤田, 陽
× 藤田, 陽× 川野, 雅史× 陣内, 宏基× 前田, 幸治× 尾関, 雅志× 藤田, 陽× Kawano, Masashi× Jinnai, Hironori |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Homoepitaxial GaAs layers grown on GaAs(001) by atomic layer epitaxy(ALE) technic are investigated. Growth temperatures are at 460, 500 and 540℃. Carrer concentrations of films were evaluated by a hall measurement technic and the parameter of fitting from Raman spectrum assumed by coupled plasmon-LO-phonon modes. The hole concentration was a maximum value at 500℃ growth intensity of photoluminescence at 10K has a maximum at 500℃ growth film. Hull width at half maximum of the LO phonon mode in raman spectrum also showed at the minimum the temperature.The growth temperature is suitable at 500℃ for GaAs film by ALE. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 37, p. 197-200, 発行日 2008-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |