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ITO透明導電膜のスプレー法による作成と評価
http://hdl.handle.net/10458/1611
http://hdl.handle.net/10458/16119bcce317-1887-46ea-9978-3e9e5222c2ee
名前 / ファイル | ライセンス | アクション |
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KJ00005015920.pdf (501.4 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-11-11 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | ITO透明導電膜のスプレー法による作成と評価 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Growth of ITO transparent conductive films deposited by spray pyrolysis method | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | ITO, Spray pyrolysis method, Transparent conducting film, Electrical resistivity | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | ITO トウメイ デンドウマク ノ スプレーホウ ニ ヨル サクセイ ト ヒョウカ | |||||
言語 | ja-Kana | |||||
著者 |
小山, 哲史
× 小山, 哲史× 加藤, 真弘× 小嶋, 稔× 吉野, 賢二× 碇, 哲雄× Oyama, Satoshi× Kato, Masahiro× 小嶋, 稔 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Sn-doped In2O3 (ITO) films were deposited by conventional spray pyrolysis method at 500℃ in air. All ITO films had polycrystalline structure of indium oxide with oriented planes of (222), (400), (440) and (622). The grain size was from 40 to 30 nm with increasing Sn concentration (0-5 mol%). The film structure and electrical resistivity were depended on Sn concentration. The resistivity decreased from 0 to 3 mol% and increased from 3 to 5 mol% of Sn concentration. A resistivity of 3.7×10-2 Ωcm, a carrier concentration of 4.1×1019 cm-3, a mobility of 5.0 cm2/Vs in the 3 mol% (Sn) at RT. The optical transmittance was more than 80 % in the visible range of the spectrum at RT. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 37, p. 107-113, 発行日 2008-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |