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スピンコート法による酸化亜鉛薄膜作製
http://hdl.handle.net/10458/4106
http://hdl.handle.net/10458/41066f58bb3a-21c8-4492-8c95-249e2dac68a2
名前 / ファイル | ライセンス | アクション |
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engineering41_123-127.pdf (2.4 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2012-10-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | スピンコート法による酸化亜鉛薄膜作製 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Growth of Spin Coating ZnO Films using Diethylzinc Solution | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | ZnO, Spin coating method, Transparent conducting film, Electrical resistivity | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | スピンコートホウ ニヨル サンカ アエン ハクマク サクセイ | |||||
言語 | ja-Kana | |||||
著者 |
小嶋, 稔
× 小嶋, 稔× 新宮, 政人× 吉野, 賢二× 碇, 哲雄× 小嶋, 稔× 新宮, 政人 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Non-doped ZnO films on a glass substrate have been successfully grown by conventional spin coating at room temperature ~ 500°C using a diethyl zinc (DEZn) based solution. The samples have an optical transmittance of more than 80%, and a smooth surface determined from optical transmittance and scanning electron microscopy, respectively. The each parameter of spin coating were determined in following, rotational speed is 1500 rpm, drying time is 30 sec, baking temperature is room temperature ~ 500°C and heating time is 5 min. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 41, p. 123-127, 発行日 2012-07-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |