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磁気中性線放電プラズマを用いたカーボンナノチューブの作製
http://hdl.handle.net/10458/421
http://hdl.handle.net/10458/421c4acc013-38c2-40cf-9892-adfd7830b212
名前 / ファイル | ライセンス | アクション |
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KJ00004439496.pdf (1.5 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2007-06-28 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 磁気中性線放電プラズマを用いたカーボンナノチューブの作製 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Production of Carbon Nanotubes by Neutral Loop Discharge Plasma | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Neural Loop Discharge(NLD), Carbon Nanotubes(CNT) | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | ジキ チュウセイセン ホウデン プラズマ オ モチイタ カーボン ナノチューブ ノ サクセイ | |||||
言語 | ja-Kana | |||||
著者 |
川尻, 晋平
× 川尻, 晋平× 楊, 鍾煥× 井上, 大士× 成, 烈汶× 大坪, 昌久× 本田, 親久× 川尻, 晋平× Yang, Jong Hwan× Inoue, Daishi× 成, 烈汶 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Recently, the big diameter making of the wafer is rapidly advanced with the ultrafine processing technology of 0.1μm in the minimum in recent semiconductor manufacturing process line width in the process of the semiconductor. Then, the plasma source by which a uniform process in a large area can be done is requested. Then, the NLD (Neutral Loop Discharge) plasma was proposed. Because the NLD plasma can dynamically control impossible plasma in past plasma, a highly effective process can be done. However, it is a current state of being limited from the structure only to the etching field now, We have aimed to pioneer the NLD plasma to a new field by applying a peculiar concept of the NLD plasma to the CNT (Carbon Nanotubes) making. |
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言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 35, p. 101-106, 発行日 2006-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |