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X線トポグラフィによるSi結晶表面下の格子歪の解析
http://hdl.handle.net/10458/409
http://hdl.handle.net/10458/40944f7c656-fecb-49d9-9e08-70741a581d0f
名前 / ファイル | ライセンス | アクション |
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KJ00004439484.pdf (915.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2007-06-28 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | X線トポグラフィによるSi結晶表面下の格子歪の解析 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Analysis of Lattice Distortion under Si Crystal Surface by X-ray Topography | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | X-ray reflection topography, Lattice distortion, Total reflection, Silicon, Annealing | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | Xセン トポグラフィ ニ ヨル Si ケッショウ ヒョウメンカ ノ コウシワイ ノ カイセキ | |||||
言語 | ja-Kana | |||||
著者 |
麻生, 貴之
× 麻生, 貴之× 福森, 太一郎× 黒木, 正子× 明石, 義人× 二神, 光次× Aso, Takayuki× Fukumori, Taichiro× 黒木, 正子 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Abstract The X-ray reflection topography under simultaneously stimulated total reflection is applied to analyze the lattice distortion just beneath the Si surface. Contrast change of the lattice distortion caused by the heat-treatment at the edge of the nitrogen ion implanted region silicon was evaluated contrast change from a systematic topographs taken at angles around the Bragg diffraction.The lattice distortion generated by annealing at the edge of the oxide film is also evaluated. The ratio of the contrast at the edge of implanted region over the averaged intensity of specimen is evaluated by transparented light intensity of films.And these ratios in a systematic topographs around the Bragg diffraction are plotted against the angles at which the topographs are taken. From this plot the difference in diffraction angle between average diffraction and edge contrast is obtained as 20" at the inner region and 15" at the outer region. |
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言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 35, p. 31-35, 発行日 2006-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |