@inproceedings{weko_4156_1,
   author	 = "津田,勇 and 湯地,敏史 and 木之下,広幸 and 岡村,好美",
   title	 = "Development of Low-Pressure High-Frequency Plasma Chemical Vapor by Thin Film Deposition System",
   booktitle	 = "プラズマ研究会資料",
   year 	 = "2014",
   volume	 = "2014",
   number	 = "29",
   pages	 = "53--58",
   publisher	 = "電気学会",
   month	 = "may"
}