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原子層エピタキシー法によって作製されたGaAsN薄膜の作製条件の違いが結晶性に与える影響のラマン分光法による評価
http://hdl.handle.net/10458/6062
http://hdl.handle.net/10458/6062d3aef6a4-d4e5-4244-8316-92bb50a4d8e2
名前 / ファイル | ライセンス | アクション |
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本文 (1.2 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2020-06-21 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 原子層エピタキシー法によって作製されたGaAsN薄膜の作製条件の違いが結晶性に与える影響のラマン分光法による評価 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Effects in Growth Conditions on Crystallinity of GaAsN Films Grown by Atomic Layer Epitaxy using Raman Spectroscopy | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | ALE, Raman, GaAsN, Crystallinity | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | ゲンシソウエピタキシーホウ ニ ヨッテ サクセイ サレタ GaAsNヒマク ノ サクセイジョウケン ノ チガイ ガ ケッショウセイ ニ アタエル エイキョウ ノ ラマンブンコウホウ ニ ヨル ヒョウカ | |||||
著者 |
橋本, 英明
× 橋本, 英明× 和田, 季己× 横山, 祐貴× 前田, 幸治× 鈴木, 秀俊× 橋本, 英明× 和田, 季己× 横山, 祐貴 |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Effects of growth conditions in GaAsN films prepared by atomic layer epitaxy have been evaluated using Raman spectroscopy. The Raman spectrum ware fitted to the LO and TO modes using the Lorentz function. The crystallinity was evaluated from the full width at half maximum of LO peak and the area intensity ratio of LO and TO peak. Crystallinity deteriorated with increasing in the growth temperature. The crystallinity was improved as the results of increasing the film thickness and decreasing of the gas supply duration. The growth temperature at 480 °C had the best crystallinity in GaAsN films. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 46, p. 113-116, 発行日 2017-07-31 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |