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電子線照射したSi_<0.75>Ge_<0.25>/Siダイオードのラマン分光法によるひずみ解析
http://hdl.handle.net/10458/4720
http://hdl.handle.net/10458/4720436607ad-50c0-4602-bd29-5047cbea07ff
名前 / ファイル | ライセンス | アクション |
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engineering103-107.pdf (1.3 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-12-26 | |||||
タイトル | ||||||
言語 | ja | |||||
タイトル | 電子線照射したSi_<0.75>Ge_<0.25>/Siダイオードのラマン分光法によるひずみ解析 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Stress Analysis of the Electron Irradiated Si_<0.75>Ge_<0.25>/Si Diode by Raman Spectroscopy | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Raman spectroscopy, Electron, Radiation damage, Strained Si, Hetero structures | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他(別言語等)のタイトル | ||||||
その他のタイトル | デンシセン ショウシャ シタ Si_<0.75>Ge_<0.25>/Si ダイオード ノ ラマン ブンコウホウ ニヨル ヒズミ カイセキ | |||||
言語 | ja-Kana | |||||
著者 |
中島, 敏之
× 中島, 敏之× 米岡, 将士× 角田, 功× 高倉, 健一郎× 大山, 英典× 中, 庸行× 吉野, 賢二× Simoen, Eddy× Claeys, Cor× 中島, 敏之× Yoneoka, Masashi× Tsunoda, Isao× Takakura, Kenichiro× Ohyama, Hidenori× Naka, Nobuyuki× Simoen, Eddy× Claeys, Cor |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | We have investigated the stress behavior in electron irradiated B-doped Si_<0.75>Ge_<0.25> / Si-substrate hetero-junctions by using Raman spectroscopy. For a high fluence (~1x10^<18> e/cm^2), the Raman peak of the Si-Si bond at the boron-doped Si_<0.75>Ge_<0.25> layer have a tendency to move toward the high wave number side. The tendency increases with increasing electron fluence. This could be explained by the local compressive stress variations in the Si_<0.75>Ge_<0.25> layer during irradiation with varying fluence, due to the difference in the generation probability of the knock-on atoms for Si, Ge and B. | |||||
言語 | en | |||||
書誌情報 |
ja : 宮崎大学工学部紀要 en : Memoirs of Faculty of Engineering, University of Miyazaki 巻 42, p. 103-107, 発行日 2013-08-30 |
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出版者 | ||||||
言語 | ja | |||||
出版者 | 宮崎大学工学部 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Faculty of Engineering, University of Miyazaki | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 05404924 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00732558 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |